NanoWave, Inc.

Semiconductor manufacture, mass data storage and precision optics

NanoWave is a MIT startup that was founded in 1995 by Tetsuo Ohara and Renee Buck.

Tetsuo Ohara (CEO)
Renee Buck (COO)

P.O. Box 2960
Lynn, MA 01903-2960
USA
Phone: +1-781-842-1844
Fax: +1-781-842-0544

The NanoWave SPPE is a “Scanning Probe Position Encoder” for the deterministic nanometer and subnanometer position measurement. In June 2003, the system achieved a picometer resolution (approximately 13 picometers* or 0.013 nanometers resolution (standard deviation at 300 Hz bandwidth within 1 sec. frame) using a 1.6mm pitch grating).
This technology, presently used in semiconductor technology or precision optics manufacturing, can also be used in nanotechnological and biotechnological applications.